ProductsKelvin Probe Card

The precision solution for four-point probes method
Seiken’s Kelvin probe cards are specifically engineered for four-terminal sensing (Kelvin connection) measurements, delivering highly accurate resistance testing for devices. By independently controlling the current (force circuit) and voltage (sense circuit), Kelvin measurements effectively eliminate the impact of contact resistance—capturing the true device resistance (Rs) with precision.
In Kelvin measurements, two terminals must contact a single electrode, such as a solder bump or pad. Seiken’s Kelvin probe cards support fine-pitch measurements starting from electrode pitches as small as 0.35mm. With the ability to reduce the terminal gap to just 0.1mm, stable and reliable contact is achievable even on ultra-small electrodes. (Patent No. 5597108 applies to this design.)
Seiken offers complete support for the specialized board required for Kelvin probes. From custom fixture design to full manufacturing services, we provide a one-stop solution—ensuring the perfect pairing between your probe card and testing equipment for maximum accuracy and efficiency.

Key Features & Advantages
01 Reliable contact with small electrodes
Designed for today’s miniaturized technologies, ensuring stable contact even with ultra-small bumps as tiny as φ180μm.
02 Flexible pin layout for multi-chip testing
Enjoy full design flexibility—our Kelvin probe cards support layouts from 100 to 1000 electrodes per chip and allow for simultaneous multi-chip testing. All of our advanced probe cards have no limitations on pin arrangement, provided the pitch requirements are met.

03 Easy maintenance with replaceable pins
Maintaining peak performance is simple; our Kelvin probe cards allow for easy pin replacement, minimizing downtime and simplifying maintenance—just like our advanced probe card models.
Application Examples
Explore more
- Semiconductor Front-End Testing